3.00 Credits
This course covers materials, wet chemical cleaning and etch, photolithography, metal deposition, doping, carrier density and conductivity, microfluidics, and micro-electronic-mechanical-systems. Prerequisite/Restriction: PHYS 2210 or PHYS 2310 PHYS 2215 PHYS 2220 or PHYS 2320 PHYS 2225 Admission to Professional Engineering Program or graduate standing Permission of instructor Cross-listed as: BENG 5700, MAE 5700, and PHYS 5700